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The influence of operating parameters on pulsed D.C. magnetron sputtering plasma

Karthikeyan, S, Hill, AE, Cowpe, JS and Pilkington, RD 2010, 'The influence of operating parameters on pulsed D.C. magnetron sputtering plasma' , Vacuum, 85 (5) , pp. 634-638.

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Abstract

This paper describes the breakdown voltage characteristics in a pulsed D.C. magnetron sputtering system under varying conditions of frequency, current and pulse-off time. The behaviour of the breakdown voltage with pulsing frequency at different pressures and constant pulse-off time was recorded and revealed that the breakdown voltage decreased consistently as the frequency increased up to 70 kHz. Above this frequency, perturbation in the breakdown voltage was noted, possibly due to the rise in pre-breakdown current during the few microseconds of pulse-on time. This perturbation effect was no longer observed when the operating current was increased. The breakdown voltage was seen to decrease when the pulse-off time was increased while keeping the total period of the pulse constant.

Item Type: Article
Themes: Subjects / Themes > Q Science
Subjects outside of the University Themes
Schools: Colleges and Schools > College of Science & Technology
Colleges and Schools > College of Science & Technology > School of Computing, Science and Engineering
Colleges and Schools > College of Science & Technology > School of Computing, Science and Engineering > Materials & Physics Research Centre
Journal or Publication Title: Vacuum
Publisher: Elsevier
Refereed: Yes
ISSN: 0042-207X
Depositing User: Dr Sreejith Karthikeyan
Date Deposited: 20 Dec 2010 15:51
Last Modified: 20 Aug 2013 17:43
URI: http://usir.salford.ac.uk/id/eprint/12555

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