Karthikeyan, Sreejith, Hill, AE and Pilkington, RD 2011, Pulsed D.C Magnetron Sputtered Mo, CuInSe2 and In2O3 Films from Powder Targets for Solar Cell Applications. , in: Photovoltaic Science Applications and Technology, 6-8 April 2011, Heriot-Watt University, Ediunburgh.

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Abstract

Pulsed D.C. Magnetron Sputtering (PDMS) is commonly used in reactive sputtering of dielectric materials because of its improved arc suppression. This is achieved by pulsing the d.c. voltage in the mid frequency region (10 to 350 kHz) to suppress the arc formation at the target and hence to deposit the dielectric material coating in a long-term arc free environment. This work reports the deposition of Mo, CuInSe2 and In2O3 films using PDMS from powder targets. These layers can be used as component layers of a typical CuInSe2 (CIS)/Cu(In,Ga)Se2 based solar cell. The overall aim of this work is to produce a solar cell that involves only a single vacuum deposition technique.

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