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Control of tin oxide film morphology by addition of hydrocarbons to the chemical vapour deposition process

Yates, HM, Evans, P, Sheel, DW, Remes, Z and Vanecek, M 2010, 'Control of tin oxide film morphology by addition of hydrocarbons to the chemical vapour deposition process' , Thin Solid Films, 519 , pp. 1334-1340.

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    Abstract

    In this paper we have shown that it is possible to modify and control the surface morphology of doped SnO2 transparent conducting oxide thin films deposited by atmospheric pressure Chemical Vapour Deposition by use of additives during the deposition process. A range of volatile organic compounds were explored, which caused changes of differing magnitude to the growth rates, crystallographic preferences, size and shape of the surface features and optical transmittance. Of the additives tested methanol and tertiary butanol were found to have the most significant influence allowing the surface to be modified from small, round features to much more elongated, sharp, pyramidal features.

    Item Type: Article
    Themes: Energy
    Schools: Colleges and Schools > College of Science & Technology > School of Computing, Science and Engineering > Materials & Physics Research Centre
    Journal or Publication Title: Thin Solid Films
    Publisher: Elsevier
    Refereed: Yes
    ISSN: 0040-6090
    Depositing User: HM Yates
    Date Deposited: 20 Oct 2011 15:43
    Last Modified: 20 Aug 2013 18:15
    URI: http://usir.salford.ac.uk/id/eprint/18565

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