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Control of tin oxide film morphology by addition of hydrocarbons to the chemical vapour deposition process

Yates, HM, Evans, P, Sheel, DW, Remes, Z and Vanecek, M 2010, 'Control of tin oxide film morphology by addition of hydrocarbons to the chemical vapour deposition process' , Thin Solid Films, 519 , pp. 1334-1340.

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Abstract

In this paper we have shown that it is possible to modify and control the surface morphology of doped SnO2 transparent conducting oxide thin films deposited by atmospheric pressure Chemical Vapour Deposition by use of additives during the deposition process. A range of volatile organic compounds were explored, which caused changes of differing magnitude to the growth rates, crystallographic preferences, size and shape of the surface features and optical transmittance. Of the additives tested methanol and tertiary butanol were found to have the most significant influence allowing the surface to be modified from small, round features to much more elongated, sharp, pyramidal features.

Item Type: Article
Themes: Energy
Schools: Schools > School of Computing, Science and Engineering > Salford Innovation Research Centre (SIRC)
Journal or Publication Title: Thin Solid Films
Publisher: Elsevier
Refereed: Yes
ISSN: 0040-6090
Depositing User: HM Yates
Date Deposited: 20 Oct 2011 14:43
Last Modified: 29 Oct 2015 00:11
URI: http://usir.salford.ac.uk/id/eprint/18565

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