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Combustion CVD: Exploration of potential for optical thin film synthesis

Gutierrez, GB 2006, Combustion CVD: Exploration of potential for optical thin film synthesis , PhD thesis, Salford : University of Salford.

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Abstract

The aim of this PhD was to undertake a study of combustion chemical vapour deposition (combustion CVD or CCVD) for the optical thin film materials synthesis. The most common variables for thin film formation were investigated, e.g. precursor volatility/availability and the result was the development of an innovative process using low-impact velocity aerosol generation in combination with a premixed propane flame. To perform coating studies, new equipment was developed that was, in concept, compatible with the flat glass coating manufacturing process giving the process industrial compatibility. Deposition of silicon oxide; d and p-block metal oxides and noble metals were achieved during this work opening opportunities for new routes to thin film optical materials. Precursor delivery/availability was significantly extended, demonstrating the possibility of using cheap, commercially available inorganic salts dissolved in water (ammonium salts, nitrate salts,...). The mechanisms involved in the transport/decomposition/thin film formation are discussed in detail providing alternative explanations to the traditional CVD mechanism reported in the literature. The materials deposited were characterised using XPS, XRD, SEM and AFM and their properties highlighted the flexibility and the novelty of the new system.

Item Type: Thesis (PhD)
Contributors: Sheel, DW (Supervisor) and Pemble, ME (Supervisor)
Schools: Schools > School of Computing, Science and Engineering
Schools > School of Computing, Science and Engineering > Salford Innovation Research Centre (SIRC)
Depositing User: Institutional Repository
Date Deposited: 03 Oct 2012 13:34
Last Modified: 29 Oct 2015 00:12
URI: http://usir.salford.ac.uk/id/eprint/26577

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