The application of MEIS for the physical characterisation of high-k ultra thin dielectric layers in microelectronic devices
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Reading, Michael Alexander 2010, The application of MEIS for the physical characterisation of high-k ultra thin dielectric layers in microelectronic devices , PhD thesis, Salford : University of Salford.
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| Item Type: | Thesis (PhD) |
|---|---|
| Additional Information: | |
| Depositing User: | Institutional Repository |
| Date Deposited: | 03 Oct 2012 14:34 |
| Last Modified: | 07 Apr 2013 12:36 |
| URI: | http://usir.salford.ac.uk/id/eprint/26876 |
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