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Alkyl-substituted allyl carbonyl metal complexes and use thereof for preparing dielectric thin films

Odedra, R, Boag, N, Anthis, J, Kanjolia, R, Saly, M 2014, Alkyl-substituted allyl carbonyl metal complexes and use thereof for preparing dielectric thin films , US8927748.

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Abstract

Organometallic complexes and use thereof in thin film deposition, such as CVD and ALD are provided herein. The organometallic complexes are (alkyl-substituted .eta..sup.3-allyl)(carbonyl)metal complexes.

Item Type: Patent
Schools: Schools > School of Computing, Science and Engineering > Salford Innovation Research Centre (SIRC)
Funders: Sigma Aldrich HiTech
Depositing User: NM Boag
Date Deposited: 17 Jun 2015 16:59
Last Modified: 29 Oct 2015 00:10
URI: http://usir.salford.ac.uk/id/eprint/35297

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