Origin of atomic clusters during ion sputtering

Rehn, LE, Birtcher, RC, Donnelly, SE, Baldo, PM and Funk, L 2001, 'Origin of atomic clusters during ion sputtering' , Physical Review Letters, 87 (20) , 207601-1-207601-4.

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Abstract

Previous studies have shown that the size distributions of small clusters ( n<=40 n = number of atoms/cluster) generated by sputtering obey an inverse power law with an exponent between -8 and -4. Here we report electron microscopy studies of the size distributions of larger clusters ( n>=500) sputtered by high-energy ion impacts. These new measurements also yield an inverse power law, but one with an exponent of -2 and one independent of sputtering yield, indicating that the large clusters are produced when shock waves, generated by subsurface displacement cascades, ablate the surface.

Item Type:	Article
Themes:	Subjects / Themes > Q Science > QC Physics Subjects outside of the University Themes
Schools:	Schools > School of Computing, Science and Engineering Schools > School of Computing, Science and Engineering > Salford Innovation Research Centre
Journal or Publication Title:	Physical Review Letters
Publisher:	American Physical Society
Refereed:	Yes
ISSN:	00319007
Related URLs:	Publisher Publisher
Depositing User:	H Kenna
Date Deposited:	22 Aug 2007 14:42
Last Modified:	16 Feb 2022 07:36
URI:	https://usir.salford.ac.uk/id/eprint/316

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