Understanding nanomechanical and surface ellipsometry of optical F-doped SnO2 thin films by in-line APCVD

Afzaal, M ORCID: https://orcid.org/0000-0001-5474-3801, Yates, HM ORCID: https://orcid.org/0000-0002-3261-0183, Al-Ahmed, A, Ul-Hamid, A, Salhi, B and Ali, M 2020, 'Understanding nanomechanical and surface ellipsometry of optical F-doped SnO2 thin films by in-line APCVD' , Applied Physics A: Materials Science and Processing, 126 , p. 840.

[img] PDF - Accepted Version
Restricted to Repository staff only until 8 October 2021.

Download (643kB) | Request a copy
Access Information: This is a post-peer-review, pre-copyedit version of an article published in Applied Physics A: Materials Science and Processing. The final authenticated version is available online at: http://dx.doi.org/10.1007/s00339-020-04033-z

Abstract

In this paper, a production-type chemical vapour deposition (CVD) is utilized to deposit fluorine doped tin oxide thin films of different thicknesses and dopant levels. Deposited films showed a preferred orientation along the (200) plane of a tetragonal structure due to the formation of halogen rich polar molecules during the process. A holistic approach studying elastic modulus and hardness of resulting films by a high-throughput atmospheric-pressure CVD process is described. The hardness values determined lie between 8 - 20 GPa. For a given load, the modulus generally increased slightly with the thickness. The average elastic recovery for the coatings was found to be between 45 – 50 %. Refractive index and thickness values derived from the fitted ellipsometry data were in excellent agreement with independent calculations from transmission and reflection data.

Item Type: Article
Schools: Schools > School of Computing, Science and Engineering > Salford Innovation Research Centre
Journal or Publication Title: Applied Physics A: Materials Science and Processing
Publisher: Springer
ISSN: 0947-8396
Related URLs:
Funders: EU Horizon 2020
Depositing User: HM Yates
Date Deposited: 29 Sep 2020 09:29
Last Modified: 08 Oct 2020 08:00
URI: http://usir.salford.ac.uk/id/eprint/58413

Actions (login required)

Edit record (repository staff only) Edit record (repository staff only)

Downloads

Downloads per month over past year