Items where Salford Author is "Van den Berg, JA"
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Number of items: 4.
|Werner, M, van den Berg, JA, Armour, DG, Carter, G, Feudel, T, Herden, M, Bersani, M, Giubertoni, D, Ottaviano, L, Bongiorno, C, Mannino, G, Bailey, P and Noakes, TCQ 2005, 'Shallow BF2 implants in Xe-bombardment-preamorphized Si: the interaction between Xe and F' , Applied Physics Letters, 86 (15) , p. 151904.|
|van den Berg, JA, Carter, G, Armour, DG, Werner, M, Goldberg, RD, Collart, EHJ, Bailey, P and Noakes, TCQ 2004, 'Damage profiles of ultrashallow B implants in Si and the Kinchin-Pease relationship' , Applied Physics Letters, 85 (15) , pp. 3074-3076.|
|Werner, M, van den Berg, JA, Armour, DG, Vandervorst, W, Collart, EHJ, Goldberg, RD, Bailey, P and Noakes, TCQ 2004, 'Damage accumulation and dopant migration during shallow As and Sb implantation into Si' , Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 216 , pp. 67-74. Item not available from this repository.|
|van den Berg, JA, Armour, DG, Zhang, S, Whelan, S, Ohno, H, Wang, TS, Cullis, AG, Collart, EHJ, Goldberg, RD, Bailey, P and Noakes, TCQ 2002, 'Characterization by medium energy ion scattering of damage and dopant profiles produced by ultrashallow B and As implants into Si at different temperatures' , Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 20 (3) , pp. 974-983. Item not available from this repository.|
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