Advanced coatings through pulsed magnetron sputtering

Kelly, PJ, Hisek, J, Zhou, Y, Pilkington, RD and Arnell, RD 2004, 'Advanced coatings through pulsed magnetron sputtering' , Surface Engineering, 20 (3) , pp. 157-162.

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Abstract

Pulsed magnetron sputtering (PMS) has become established as the process of choice for the deposition of dielectric materials for many applications. The process is attractive because it offers stable arc free operating conditions during the deposition of, for example, functional films on architectural and automotive glass, or antireflective/antistatic coatings on displays. Recent studies have shown that pulsing the magnetron discharge also leads to hotter and more energetic plasmas in comparison with continuous dc discharges, with increased ion energy fluxes delivered to the substrate. As such, the PMS process offers benefits in the deposition of a wide range of materials. The present paper describes three examples where PMS has led to either significant enhancement in film properties or enhanced process flexibility: in low friction titanium nitride coatings, in Al doped zinc oxide transparent conductive oxide coatings sputtered directly from powder targets and in thin film photovoltaic devices based on copper (indium/gallium) diselenide. These examples demonstrate the versatility of PMS and open up new opportunities for the production of advanced coatings using this technique.

Item Type:	Article
Themes:	Subjects / Themes > T Technology > TA Engineering (General). Civil engineering (General) > TA401 Materials of engineering and construction. Mechanics of materials Subjects / Themes > Q Science > QD Chemistry Subjects / Themes > Q Science > QC Physics Built and Human Environment Subjects outside of the University Themes
Schools:	Schools > School of Computing, Science and Engineering Schools > School of Computing, Science and Engineering > Salford Innovation Research Centre
Journal or Publication Title:	Surface Engineering
Publisher:	Maney Publishing
Refereed:	Yes
ISSN:	02670844
Related URLs:	Publisher Publisher
Depositing User:	MDJ Davies
Date Deposited:	19 Oct 2007 14:59
Last Modified:	16 Feb 2022 08:07
URI:	https://usir.salford.ac.uk/id/eprint/1562

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