Items where Journal is "Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures"
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Jump to: 2002
Number of items: 2.
2002
| van den Berg, JA, Armour, DG, Zhang, S, Whelan, S, Ohno, H, Wang, TS, Cullis, AG, Collart, EHJ, Goldberg, RD, Bailey, P and Noakes, TCQ 2002, 'Characterization by medium energy ion scattering of damage and dopant profiles produced by ultrashallow B and As implants into Si at different temperatures' , Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 20 (3) , pp. 974-983. Item not available from this repository. |
| Terry, J, Haworth, LI, Gundlach, AM, Stevenson, JTM, Vishnyakov, VM and Donnelly, SE 2002, 'Incorporation of helium-implant-induced cavities near the active regions of metal-oxide-semiconductor devices: effects on dc electrical characteristics' , Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 20 (1) , pp. 306-310. Item not available from this repository. |